Silane 硅烷 (SiH4)
Total Purity 纯度：>99.9999%
Vapor Phase Impurities
气相杂质
|
Contaminants 杂质 |
|
Specifications (ppmv) 规格 |
|
Ar |
Argon 氩气 |
<0.05 |
|
Total Chlorosilane |
Total Chlorosilane 总氯硅烷 |
<0.15 |
|
Disilane |
Disilane 乙硅烷 |
<0.5 |
|
He |
Helium 氦气 |
<1 |
|
O2 |
Oxygen 氧气 |
<0.05 |
|
N2 |
Nitrogen 氮气 |
<1 |
|
H2 |
Hydrogen 氢气 |
<20 |
|
CO |
Carbon Monoxide 一氧化碳 |
<0.05 |
|
CO2 |
Carbon Dioxide 二氧化碳 |
<0.05 |
|
CH4 |
Methane 甲烷 |
<0.05 |
|
Carbon |
Carbon 碳 |
<0.2 ppma |
|
Disiloxane |
Disiloxane 二硅氧烷 |
<0.5 |
|
Methylsilane |
Methylsilane 甲基硅烷 |
<0.5 |
|
Al |
Aluminium 铝 |
<0.005 ppba |
|
Sb |
Antimony 锑 |
<0.005 ppba |
|
As |
Arsenic 砷 |
<0.005 ppba |
|
B |
Boron 硼 |
<0.02 ppba |
|
Ca |
Calcium 钙 |
<10 ppba |
|
Ga |
Gallium 鎵 |
<0.005 ppba |
|
In |
Indium 铟 |
<0.005 ppba |
|
P |
Phosphorus 磷 |
<0.02 ppba |
|
K |
Potassium 钾 |
<10 ppba |
|
Na |
Sodium 钠 |
<5 ppba |
|
Cr+Cu+Fe+Ni+Zn |
铬+铜+铁+镍+锌 |
<1 ppba |
|
H2O |
Moisture 水 |
<0.5 |
|
Resistivity |
Resistivity 电阻系数 |
>10000 ohm-cm |
Standard Package Information
包装规格
|
Cylinder Type气瓶规格 |
47?, Ton-cylinder, 20ft ISO-Container, 40ft ISO-Container |
|
Fill Weight充装量 (kg) |
10, 100 , 2000 , 4000 |
|
Valve Connection 阀门(CGA) |
JIS 22L, CGA 632, CGA350 |